Controllability Analysis of Reactive Magnetron Sputtering Process
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Acta Physica Polonica A
سال: 2013
ISSN: 0587-4246,1898-794X
DOI: 10.12693/aphyspola.123.3